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Home / Case Studies / Advanced IPA Removal Solution for Semiconductor Manufacturing
Advanced IPA Removal Solution for Semiconductor Manufacturing
Details
There is a slight challenge in saturating the solution with isopropyl alcohol and generating alcohol vapors, which also affect efficiency. Therefore, when selecting a scrubber, it is necessary to consider all influencing factors, as well as choose the appropriate nozzle inside the scrubber, the pumping station, and the operating mode that can handle this process with high efficiency.
Design and supply a wet scrubber capable of maintaining 90% efficiency under operating conditions, including:
- Processing an exhaust stream of 100 scfm.
- Operating effectively at an exhaust temperature of 72°F.
- Ensuring performance even as the scrubbing solution becomes saturated with IPA.
Task
The production process releases isopropyl alcohol (IPA) into the exhaust stream at a concentration of 15 ppmv. The client requires a solution to remove IPA with at least 90% efficiency. Challenges include the saturation of the scrubbing solution and the formation of IPA vapors, which may reduce scrubbing efficiency.
Problem
Air purification system in a semiconductor manufacturing facility.
Production Process
One of the largest creators of next-generation semiconductor technology in the USA.
Client
Initial Data
Client Communication
Client, Environmental Engineer:
I need help with removing 15 ppmv isopropyl alcohol from a 100 scfm exhaust stream at 90% efficiency using a wet scrubber technology. Do you have a wet scrubber that can meet these specifications?
Engineer Torch-Air:
Our standard wet scrubber will be suitable.
Gas cleaning efficiency from 90 no more 99.99% depending on the gas and the solution used for irrigation and the gas flow temperature.
The efficiency of the scrubber in its standard configuration (example):
At the start of scrubber operation, with clean water in the tank and clean water used for irrigation, alcohol capture efficiency will be 99.9%.
As the scrubber operates, the solution will become saturated with alcohol, reducing efficiency.
The incoming alcohol concentration is very low (15 ppmv), so with circulation, efficiency will drop quickly. At 5% alcohol in the solution, efficiency falls below 90%.
Efficiency heavily depends on gas and solution temperatures—the lower the temperatures, the higher the efficiency.
Operation without circulation requires 3 GPM of clean water.
- Volume: 100 cfm
- Weight: 167 lbs
- Temperature range: from 40 to 170°F (5 to 80°C)
- Pump 1/2 HP 115/230V, 1 Phase Motor
- Gas concentration at the scrubber inlet 2000 ppm.
Gas cleaning efficiency from 90 no more 99.99% depending on the gas and the solution used for irrigation and the gas flow temperature.
The efficiency of the scrubber in its standard configuration (example):
- HCl-NaOH: 99.5%
- HF-H2O: 99.5%
- NH3-H2O: 99.9%
- Cl2-NaOH: 98%
At the start of scrubber operation, with clean water in the tank and clean water used for irrigation, alcohol capture efficiency will be 99.9%.
As the scrubber operates, the solution will become saturated with alcohol, reducing efficiency.
The incoming alcohol concentration is very low (15 ppmv), so with circulation, efficiency will drop quickly. At 5% alcohol in the solution, efficiency falls below 90%.
Efficiency heavily depends on gas and solution temperatures—the lower the temperatures, the higher the efficiency.
Operation without circulation requires 3 GPM of clean water.
Client, Environmental Engineer:
Thank you for your prompt response. I am checking on the IPA temperature in the exhaust. Also, the application is in North Carolina. We need the 90% efficiency guaranteed. Is that possible? What is the lead time for delivery should we chose this design option?
Thanks
Thanks
Engineer Torch-Air:
↩ I am checking on the IPA temperature in the exhaust.
Thank you, we need it
↩ Also, the application is in North Carolina.
Delivery will cost around 800-900
↩ We need the 90% efficiency guaranteed. Is that possible?
Yes, i wrote the work logic process below. If you need efficiency you need to maintain clean water.
↩ What is the lead time for delivery should we chose this design option?
45 work days.
Best regards
Thank you, we need it
↩ Also, the application is in North Carolina.
Delivery will cost around 800-900
↩ We need the 90% efficiency guaranteed. Is that possible?
Yes, i wrote the work logic process below. If you need efficiency you need to maintain clean water.
↩ What is the lead time for delivery should we chose this design option?
45 work days.
Best regards
Client, Environmental Engineer:
The exhaust is expected to 72 degrees F. Please let me know if that changes the efficiency.
Thanks
Thanks
Engineer Torch-Air:
Yes, the scrubber's efficiency has been calculated at this temperature with clean water irrigation.
Best regards
Best regards
Proposed Solutions
A wet scrubber designed to efficiently handle the exhaust stream, capable of processing 100 scfm and maintaining 90% efficiency under the specified conditions.
Scrubber Parameters:
Volume: 100 CFM
Weight: 167 lbs
Temperature range: 40 to 170°F (5 to 80°C)
Pump: 1/2 HP, 115/230V, 1 Phase Motor
Gas concentration at the scrubber inlet: 2000 ppm
Gas cleaning efficiency: 90% to 99.99%, depending on the gas and solution used.
Volume: 100 CFM
Weight: 167 lbs
Temperature range: 40 to 170°F (5 to 80°C)
Pump: 1/2 HP, 115/230V, 1 Phase Motor
Gas concentration at the scrubber inlet: 2000 ppm
Gas cleaning efficiency: 90% to 99.99%, depending on the gas and solution used.
Wet Scrubber Torch-Air
Result
The client is satisfied with the efficient performance of our scrubber.
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Head of Engineering,
Vladimir Nikulin
Vladimir Nikulin
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